High Vacuum Equipment
Classification:
Key words:
Refrigerant filling machine, explosion-proof filling machine, vacuum purification filling machine, special power supply, helium inspection equipment
Product Introduction

Vacuum Equipment
Applications
● High vacuum exhaust for electronic glassware
● Filling the exhausted electronic glassware with protective gas at a specified pressure
● Providing an external temperature environment of 600℃ for electronic glassware during vacuum exhaust using a heating cover
● Helium mass spectrometry leak detection for workpieces
Features:
● The rough pumping system uses a dry vacuum pump, which has a fast pumping speed and no oil gas pollution.
● The fine pumping system uses a low-temperature pump as the exhaust pump, which has a fast pumping speed and no oil gas pollution.
● Vacuum pumping, vacuum degree detection, temperature detection, and workpiece leak detection are all completed automatically.
● Key components such as vacuum pumps, low-temperature pumps, and vacuum gauges are selected from well-known foreign companies like Japan.
● Controllers such as PLC and touch screens are selected from well-known foreign brands.
● The equipment is easy to operate and can provide two working modes: automatic operation and manual operation; it can also be set online according to system operation conditions, allowing for hierarchical processing of system parameters and providing password protection.
● The touch screen can directly provide various operating statuses, vacuum degrees, alarm contents, etc.; it can also provide historical data for customer quality tracking.
Parameters:
● Temperature control range: 100-600℃
● Heating rate: average 8~10℃/min
● Pumping speed and ultimate vacuum of the vacuum pump: pumping speed 2800L/S; ultimate vacuum: 10-7Pa
● Inflation pressure range: 10Pa--105 Pa (adjustable)
● Production cycle: can handle 40 workpieces simultaneously

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The main products of our company now include refrigerant filling machine, explosion-proof filling machine, vacuum purification filling machine, special power supply, helium inspection equipment, etc.
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